microactuators

Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

1 min read · Thu, Oct 4 2012

fractals Circuits microactuators

Amro M. Elshurafa, et al., "Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in" Micro & Nano Letters 7, (9), 2012, 965. Abstract: This Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in